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Электронный компонент: S7011

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S7010/S7011/S7015 series
S7010/S7011/S7015 series are families of FFT-CCD image sensors specifically designed for low-light-level detection in scientific applications. By
using the binning operation, S7010/S7011/S7015 series can be used as a linear image sensor having a long aperture in the direction of the
device length. This makes S7010/S7011/S7015 series ideally suited for use in spectrophotometry. The binning operation offers significant
improvement in S/N and signal processing speed compared with conventional methods by which signals are digitally added by an external circuit.
S7010/S7011/S7015 series also feature low noise and low dark signal (MPP mode operation). This enables low-light-level detection and long
integration time, thus achieving a wide dynamic range.
S7010/S7011/S7015 series have an effective pixel size of 24 24 m and are available in image areas ranging from 12.288 (H) 1.44 (V) mm
2
(512 60 pixels) up to a large image area of 24.576 (H) 6.048 (V) mm
2
(1024 252 pixels).
Features
l 512 (H) 60 (V) to 1024 (H) 252 (V) pixel format
l Pixel size: 24 24 m
l Line/pixel binning
l 100 % fill factor
l Wide dynamic range
l Low dark signal
l Low readout noise
l MPP operation
Applications
l Fluorescence spectrometer, ICP
l Raman spectrometer
l Industrial inspection requiring
l Semiconductor inspection
l DNA sequencer
l Low-light-level detection
I M A G E S E N S O R
CCD area image sensor
Front-illuminated FFT-CCD
I Selection guide
Type No.
Cooling
Number of total
pixels
Number of active
pixels
Active area
[mm (H) mm (V)]
Suitable
multichannel
detector Head
S7010-0906
532 64
512 60
12.288 1.440
S7010-0907
532 128
512 124
12.288 2.976
S7010-0908
532 256
512 252
12.288 6.048
S7010-1006
1044 64
1024 60
24.576 1.440
S7010-1007
1044 128
1024 124
24.576 2.976
S7010-1008
Non-cooled
1044 256
1024 252
24.576 6.048
C7020
S7011-0906
532 64
512 60
12.288 1.440
S7011-0907
532 128
512 124
12.288 2.976
S7011-1006
1044 64
1024 60
24.576 1.440
S7011-1007
1044 128
1024 124
24.576 2.976
C7021
S7015-0908
532 256
512 252
12.288 6.048
S7015-1008
One-stage
TE-cooled
1044 256
1024 252
24.576 6.048
C7025
I General ratings
Parameter
Specification
Pixel size
24 (H) 24 (V) m
Vertical clock phase
2 phase
Horizontal clock phase
2 phase
Output circuit
One-stage MOSFET source follower
Package
24 pin ceramic DIP (refer to dimensional outlines)
Window *
1
S7010 series: quartz glass
S7011 series: sapphire glass
S7015 series: quartz glass *
2
*1: Window-less is available upon request.
*2: Sapphire glass is available upon request.
1
CCD area image sensor
S7010/S7011/S7015 series
I A b s o lu te m a x im u m ra tin g s (T a = 2 5 C )
P a ra m e te r
S ym b o l
M in .
T yp .
M a x.
U n it
O p e ra tin g te m p e ra tu re
T o p r
-5 0
-
+ 3 0
C
S to ra g e te m p e ra tu re
T s tg
-5 0
-
+ 7 0
C
O D vo lta g e
V
O D
-0 .5
-
+ 2 5
V
R D vo lta g e
V
R D
-0 .5
-
+ 1 8
V
IS V vo lta g e
V
IS V
-0 .5
-
+ 1 8
V
IS H vo lta g e
V
IS H
-0 .5
-
+ 1 8
V
IG V vo lta g e
V
IG 1 V
, V
IG 2 V
-1 0
-
+ 1 5
V
IG H vo lta g e
V
IG 1 H
, V
IG 2 H
-1 0
-
+ 1 5
V
S G vo lta g e
V
S G
-1 0
-
+ 1 5
V
O G vo lta g e
V
O G
-1 0
-
+ 1 5
V
R G vo lta g e
V
R G
-1 0
-
+ 1 5
V
T G vo lta g e
V
T G
-1 0
-
+ 1 5
V
V e rtic a l c lo c k vo lta g e
V
P 1 V
, V
P 2 V
-1 0
-
+ 1 5
V
H o rizo n ta l c lo c k vo lta g e
V
P 1 H
, V
P 2 H
-1 0
-
+ 1 5
V
I O p e ra tin g c o n d itio n s (M P P m o d e , T a = 2 5 C )
P a ra m e te r
S ym b o l
M in .
T yp .
M a x.
U n it
O u tp u t tra n s is to r d ra in vo lta g e
V
O D
1 8
2 0
2 2
V
R e s e t d ra in vo lta g e
V
R D
1 1 .5
1 2
1 2 .5
V
O u tp u t g a te vo lta g e
V
O G
1
3
5
V
S u b s tra te vo lta g e
V
S S
-
0
-
V
T e s t p o in t (ve rtic a l in p u t s o u rc e )
V
IS V
-
V
R D
-
V
T e s t p o in t (h o rizo n ta l in p u t s o u rc e )
V
IS H
-
V
R D
-
V
T e s t p o in t (ve rtic a l in p u t g a te )
V
IG 1 V
, V
IG 2 V
-8
0
-
V
T e s t p o in t (h o rizo n ta l in p u t g a te )
V
IG 1 H
, V
IG 2 H
-8
0
-
V
H ig h
V
P 1 V H
, V
P 2 V H
4
6
8
V e rtic a l s h ift re g is te r
c lo c k vo lta g e
L o w
V
P 1 V L
, V
P 2 V L
-9
-8
-7
V
H ig h
V
P 1 H H
, V
P 2 H H
4
6
8
H o rizo n ta l s h ift re g is te r
c lo c k vo lta g e
L o w
V
P 1 H L
, V
P 2 H L
-9
-8
-7
V
H ig h
V
S G H
4
6
8
S u m m in g g a te vo lta g e
L o w
V
S G L
-9
-8
-7
V
H ig h
V
R G H
4
6
8
R e s e t g a te vo lta g e
L o w
V
R G L
-9
-8
-7
V
H ig h
V
T G H
4
6
8
T ra n s fe r g a te vo lta g e
L o w
V
T G L
-9
-8
-7
V
I E le c tric a l c h a ra c te ris tic s (Ta = 2 5 C )
P a ra m e te r
S ym b o l
M in .
T yp .
M a x.
U n it
S ig n a l o u tp u t fre q u e n c y
fc
-
-
1
M H z
Ve rtic a l s h ift re g is te r c a p a c ita n c e *
3
C
P 1 V
, C
P 2 V
-
3 ,0 0 0
-
p F
H o rizo n ta l s h ift re g is te r c a p a c ita n c e *
3
C
P 1 H
, C
P 2 H
-
1 2 0
-
p F
S u m m in g g a te c a p a c ita n c e
C
S G
-
7
-
p F
R e s e t g a te c a p a c ita n c e
C
R G
-
7
-
p F
Tra n s fe r g a te c a p a c ita n c e
C
T G
-
1 2 0
-
p F
C h a rg e tra n s fe r e ffic ie n c y *
4
C T E
0 .9 9 9 9 5
0 .9 9 9 9 9
-
-
D C o u tp u t le ve l *
5
V o u t
1 2
1 5
1 8
V
O u tp u t im p e d a n c e *
5
Z o
-
3
-
k W
P o w e r c o n s u m p tio n *
5
*
6
P
-
1 5
-
m W
*3 : S 7 0 1 0 /S 7 0 11 -1 0 0 7
*4 : C h a rg e tra n s fe r e ffic ie n c y p e r p ixe l, m e a s u re d a t h a lf o f th e fu ll w e ll.
*5 : T h e va lu e s d e p e n d o n th e lo a d re s is ta n c e . (typ ic a l, V O D = 2 0 V, lo a d re s is ta n c e = 2 2 k W )
*6 : P o w e r c o n s u m p tio n o f th e o n -c h ip a m p lifie r.
I E le c tric a l a n d o p tic a l c h a ra c te ris tic s (Ta = 2 5 C , u n le s s o th e rw is e n o te d )
P a ra m e te r
S ym b o l
M in .
T yp .
M a x.
U n it
S a tu ra tio n o u tp u t vo lta g e
V s a t
-
F w S v
-
V
V e rtic a l
1 5 0 ,0 0 0
3 0 0 ,0 0 0
-
F u ll w e ll c a p a c ity
Horizontal *
7
F w
3 0 0 ,0 0 0
6 0 0 ,0 0 0
-
e
-
C C D n o d e s e n s itivity
S v
1 .8
2 .2
-
V /e
-
2 5 C
-
4 0 0
3 0 0 0
D a rk cu rre n t *
8
M P P m o d e
(te n ta tive d a ta )
0 C
D S
-
2 0
1 5 0
e
-
/p ixe l/s
R e a d o u t n o is e *
9
N r
-
8
1 2
e
-
rm s
L in e b in n n g
2 5 ,0 0 0
7 5 ,0 0 0
-
-
D yn a m ic ra n g e *
1 0
A re a s c a n n in g
D R
1 2 ,0 0 0
3 7 ,5 0 0
-
-
P h o to re s p o n s e n o n -u n ifo rm ity *
1 1
P R N U
-
3
1 0
%
S p e c tra l re s p o n s e ra n g e
l
-
4 0 0 to 1 ,1 0 0
-
n m
*7 : L a rg e h o rizo n ta l fu ll w e ll fo r v e rtic a l b in n in g o p e ra tio n .
*8 : D a rk c u rre n t n e a rly d o u b le s fo r e ve ry 5 to 7 C in c re a s e in te m p e ra tu re .
*9 : -4 0 C , o p e ra tin g fre q u e n c y is 1 5 0 k H z .
*1 0 : D yn a m ic ra n g e : D R = F u ll w e ll/R e a d o u t n o is e .
*11 : M e a s u re d a t h a lf o f fu ll w e ll c a p a c ity.
P h o to re s p o n s e n o n -u n ifo rm ity:
P R N U (% ) =
Signal
peak)
to
(peak
noise
pattern
Fixed
1 0 0
2
CCD area image sensor
S7010/S7011/S7015 series
I Device structure, line output format
......
......
......
V
1
H
IG1V IG2V ISV
SS
RG
RD
OS
OD
OG
SG
D1
D2
D3
D4
D5
D6
D7
D8
D9
D10
D11
D12
D13
D14
D15
D16
D17
D18
D19
D20
1
2
3
4
5
6
20
23
22
24
16
15
V=60, 124, 252
H=512, 1024
ISH
IG1H
IG2H
P1H
P2H
13
12
11
10
9
4 BLANK
4 BLANK
4 OPTICAL
BLACK
4 OPTICAL
BLACK
512 or
1024
SIGNAL OUT
2 ISOLATION
2 ISOLATION
TG
P1V
14
P2V
I Spectral response (without window)
KMPDB0051EA
50
40
30
20
10
0
400
500
600
700
WAVELENGTH (nm)
800
900
1000 1100 1200
QUANTUM EFFICIENCY (%)
(Typ. Ta=25 C)
Pixel format
Left Horizontal Direction Right
Blank
Optical Black
Isolation
Effective
Isolation
Optical Black
Blank
4
4
2
512 or 1024
2
4
4
Top Vertical Direction Bottom
Isolation
Effective
Isolation
2
60, 124 or 252
2
KMPDC0015EB
I Spectral transmittance characteristics
0
10
100
200
WAVELENGTH (nm)
TRANSMITTANCE (%)
300
400
500
600
700
800
900 1000
20
30
40
50
60
70
80
90
100
(Typ. Ta=25 C)
QUARTZ WINDOW
SAPPHIRE WINDOW
KMPDB0101EA
3
CCD area image sensor
S7010/S7011/S7015 series
INTEGRATION PERIOD
(Shutter must be open)
VERTICAL BINNING PERIOD
(Shutter must be closed)
3.. 62
3..126
3..254
63
127
255
64
128
256
P1V
P2V, TG
P1H
P2H, SG
READOUT PERIOD (Shutter must be closed)
60 + 4 (ISOLATION): S701*-0906/-1006
124 + 4 (ISOLATION): S701*-0907/-1007
252 + 4 (ISOLATION): S701*-0908/-1008
Tpwv
Tovr
Tpwh, Tpws
Tpwr
1
2
3
531
1043
532
1044
: S701*-0906/-0907/-0908
: S701*-1006/-1007/-1008
4..530
4..1042
1
2
D19
D2
D1
D20
RG
OS
S1..S512
D3..D10, S1..S1024, D11..D18
: S701*-0906/-0907/-0908
: S701*-1006/-1007/-1008
INTEGRATION PERIOD
(Shutter must be open)
P1V
RG
OS
P2V, TG
P1H
P2H, SG
READOUT PERIOD (Shutter must be closed)
ENLARGED VIEW
4.. 63
4..127
4..255
Tpwv
Tovr
Tpwr
D1
D2
D3
D4
D18
D19
D20
S1..S512
D5..D10, S1..S1024, D11..D17
: S701*-0906/-0907/-0908
: S701*-1006/-1007/-1008
P2V, TG
P1H
P2H, SG
RG
OS
Tpwh, Tpws
1
2
3
64
60 + 4 (ISOLATION): S701*-0906/-1006
128
124 + 4 (ISOLATION): S701*-0907/-1007
256
252 + 4 (ISOLATION): S701*-0908/-1008
KMPDC0122EA
I Timing chart
Parameter
Symbol
Remark
Min.
Typ.
Max.
Unit
Pulse width
Tpwv
6 *
!
-
-
s
P1V, P2V, TG
Rise and fall time
Tprv, Tpfv
*
200
-
-
ns
Pulse width
Tpwh
500
-
-
ns
Rise and fall time
Tprh, Tpfh
10
-
-
ns
P1H, P2H
Duty ratio
-
*
-
50
-
%
Pulse width
Tpws
500
-
-
ns
Rise and fall time
Tprs, Tpfs
10
-
-
ns
SG
Duty ratio
-
-
-
50
-
%
Pulse width
Tpwr
100
-
-
ns
RG
Rise and fall time
Tprr, Tpfr
-
5
-
-
ns
TG P1H
Overlap time
Tovr
-
3
-
-
s
*12: Symmetrical pulses should be overlapped at 50 % of maximum amplitude.
*13: In case of S701*-0908/-1007.
KMPDC0123EA
Line binning
Area scanning 1: low dark current mode
4
CCD area image sensor
S7010/S7011/S7015 series
INTEGRATION PERIOD
(Shutter must be open)
P1V
RG
OS
P2V, TG
P1H
P2H, SG
READOUT PERIOD (Shutter must be closed)
ENLARGED VIEW
Tpwv
Tovr
Tpwr
D1
D2
D3
D4
D18
D19
D20
P2V, TG
P1H
P2H, SG
RG
OS
Tpwh, Tpws
1
2
3
4.. 63
4..127
4..255
S1..S512
D5..D10, S1..S1024, D11..D17
: S701*-0906/-0907/-0908
: S701*-1006/-1007/-1008
64
60 + 4 (ISOLATION): S701*-0906/-1006
128
124 + 4 (ISOLATION): S701*-0907/-1007
256
252 + 4 (ISOLATION): S701*-0908/-1008
Parameter
Symbol
Remark
Min.
Typ.
Max.
Unit
Pulse width
Tpwv
6 *
#
-
-
s
P1V, P2V, TG
Rise and fall time
Tprv, Tpfv
*
"
200
-
-
ns
Pulse width
Tpwh
500
-
-
ns
Rise and fall time
Tprh, Tpfh
10
-
-
ns
P1H, P2H
Duty ratio
-
*
"
-
50
-
%
Pulse width
Tpws
500
-
-
ns
Rise and fall time
Tprs, Tpfs
10
-
-
ns
SG
Duty ratio
-
-
-
50
-
%
Pulse width
Tpwr
100
-
-
ns
RG
Rise and fall time
Tprr, Tpfr
-
5
-
-
ns
TG P1H
Overlap time
Tovr
-
3
-
-
s
*14: Symmetrical pulses should be overlapped at 50 % of maximum amplitude.
*15: In case of S701*-0908/-1007.
KMPDC0124EA
Parameter
Symbol
Remark
Min.
Typ.
Max.
Unit
Pulse width
Tpwv
6 *
%
-
-
s
P1V, P2V, TG
Rise and fall time
Tprv, Tpfv
*
$
200
-
-
ns
Pulse width
Tpwh
500
-
-
ns
Rise and fall time
Tprh, Tpfh
10
-
-
ns
P1H, P2H
Duty ratio
-
*
$
-
50
-
%
Pulse width
Tpws
500
-
-
ns
Rise and fall time
Tprs, Tpfs
10
-
-
ns
SG
Duty ratio
-
-
-
50
-
%
Pulse width
Tpwr
100
-
-
ns
RG
Rise and fall time
Tprr, Tpfr
-
5
-
-
ns
TG - P1H
Overlap time
Tovr
-
3
-
-
s
*16: Symmetrical pulses should be overlapped at 50 % of maximum amplitude.
*17: In case of S701*-0908/-1007.
Area scanning 2: large full well mode
5