FEATURES
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Quantum Efficiency of CCD chip
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Extremely high UV, DUV and VUV
sensitivity
APPLICATIONS
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Beam Diagnostics of Stepper
Excimer Lasers: F
2
(157 nm), ArF
(193 nm), KrF(248 nm)
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Development of UV optics
Spectral Response Characteristic of CCD chip*
BT(Back-thinned)-CCD
DATA SHEET
100
200
300
400
500
600
700
800
900 1000 1100 1200
100
80
60
40
20
0
Wavelength (nm)
Quantum Efficiency (%)
Excimer Laser
F
2
ArF
KrF
Wavelength (nm)
157
193
248
Quantum
84
57
69
* Without sapphire window. The spectral response with sapphire
window is decrease by the transmittance.
(This is typical, not guaranteed. )
Efficiency(%)
(This is typical, not guaranteed. )
Without sapphire
window
With sapphire
window
34 **
42 **
55 **
C8000-10
Digital Camera
**Calclated value
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Low dark noise with peltier cooling
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Binning function / Sub-array function
The C8000 camera series employs an ultra high sensitive
back-thinned CCD sensor made by Hamamatsu. Espe-
cially in the UV, DUV and VUV wavelength ranges, the
C8000 series offers extremely high sensitivity never be-
fore realized by other scientific CCDs.
DIMENSIONAL OUTLINES (UNIT: mm)
Camera controller (approx. 5.0 kg)
SPECIFICATIONS
Imaging device
Back-thinned frame transfer CCD
Effective number of pixels
640 (H)
480 (V)
Cell size
14
m (H)
14
m (V)
Effective area
Full well capacity
50,000 electrons (typical value)
Readout noise (r.m.s.)
approx. 100 electrons r.m.s.
Frame rate
16 bit RS-644 LVDS
RS-232C
Output signal (digital output)
8.96 mm(H)
6.72mm (V) / 2/3 inch format
C-mount
Dynamic range*
500 : 1
Cooling method
Peltier cooling /natural air cooling
Cooling temperature
Dark current
A/D converter
12 bit
Exposure time
1 sec max. (On chip integration)
External control
Camera head (approx. 1.1 kg)
C8000-10
*Calculated from the ratio of the full well capacity and the readout noise.
Ambient operating temperature
Power consumption
Ambient storage/operating humidity
70VA
70% max. (with no condensation)
-10 to +50C
0 to +40C
Model
+5 C (Cools the CCD element to 20C less than the ambient temperature)
,D=8
4-M
3
4
0.5
50
1
8
0.5
132
2
18
0.5
32
0.5
40
1
1
40
90
1
1
75
37.5
0.5
6.3
3
D=6
1-32UN C-mount
1/4-20UNC,D=8
C8000
CCD CAMERA
285
2
23
2
74
1
7
2
200
2
262
1
333
1
POWER
C8000
CCD CAMERA CONTROLLER
Line voltage
Ambient storage temperature
100 / 117 / 220 / 240 VAC 50/60Hz
External trigger input
Super-pixel readout (Binning)
2
2, 4
4, 8
8,
Sub-array readout
1/1, 1/2, 1/4, 1/8 (H)
8 pixel unit (V)
Contrast enhancement gain
Approx. 1 to 5 times
Lens mount
30.9Hz, 55.0Hz(2
2 binning), 91.7Hz(4
4 binning), 131.6Hz(8
8binning)
Yes
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approx. 135 electrons/pixels/ sec
High scan mode
Middle scan mode
Slow scan mode
15.4Hz, 29.5Hz(2
2 binning), 51.5Hz(4
4 binning), 80.6Hz(8
8binning)
7.7Hz, 14.7Hz(2
2 binning), 25.8Hz(4
4 binning), 40.0Hz(8
8binning)
Homepage Address http://www.hamamatsu.com
5
Product and software package names noted in this documentation are trademarks or registered trademarks of their respective manufacturers.
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Subject to local technical requirements and regulations, availability of products included in this promotional material may vary. Please consult with our sales office.
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Information furnished by HAMAMATSU is believed to be reliable. However, no responsibility is assumed for possible inaccuracies or omissions.
Specifications and external appearance are subject to change without notice..
2000 Hamamatsu Photonics K.K.
ISO 9001
Certificate: 09 105 79045
HAMAMATSU PHOTONICS K.K., Systems Division
812 Joko-cho, Hamamatsu City, 431-3196, Japan, Telephone: (81)53-431-0124, Fax: (81)53-435-1574, E-mail:export@sys.hpk.co.jp
U.S.A. and Canada: Hamamatsu Photonic Systems: 360 Foothill Road, Bridgewater, N.J. 08807-0910, U.S.A., Telephone: (1)908-231-1116, Fax: (1)908-231-0852, E-mail: usa@hamamatsu.com
Germany: Hamamatsu Photonics Deutschland GmbH: Arzbergerstr. 10, D-82211 Herrsching am Ammersee, Germany, Telephone: (49)8152-375-0, Fax: (49)8152-2658, E-mail: info@hamamatsu.de
,
France: Hamamatsu Photonics France S.A.R.L.: 8, Rue du Saule Trapu, Parc du Moulin de Massy, 91882 Massy Cedex, France, Telephone: (33)1 69 53 71 00, Fax: (33)1 69 53 71 10, E-mail: infos@hamamatsu.fr
United Kingdom: Hamamatsu Photonics UK Limited: 2 Howard Court, 10 Tewin Road, Welwyn Garden City, Hertfordshire, AL7 1BW, U.K., Telephone: (44) 1707-294888, Fax: (44) 1707-325777, E-mail: info@hamamatsu.co.uk
North Europe: Hamamatsu Photonics Norden AB: Smidesvgen 12, SE-171-41 Solna, Sweden, Telephone: (46)8-509-031-00, Fax: (46)8-509-031-01, E-mail: info@hamamatsu.se
-
Italy: Hamamatsu Photonics Italia S.R.L.: Strada della Mois, 1/E 20020 Arese (Milano), Italy, Telephone: (39)02-935 81 733, Fax: (39)02-935 81 741, E-mail: info@hamamatsu.it
Cat. No. SICS1084E01
JUL/2001 HPK
Created in Japan (PDF)
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